Our technologies deliver high-precision control, easy-to-integrate system architectures, and robust performance – even under extreme environmental conditions and demanding load profiles.
Semiconductor manufacturing operates on the edge of precision — where even micron-scale errors can impact yields. As the industry continues to evolve with smaller process nodes and larger wafer sizes, this demand for precision and reliability in motion control will only increase.
We engineered our high-performance digital servo drives to meet these demands, empowering manufacturers to boost their yields, minimize defects and enhance overall production efficiency. Featuring precise positioning, speed regulation and force control, our servo drives are ideal for rigorous semiconductor applications — from wafer handling to lithography — offering the high power density, advanced feedback capabilities, safety and exceptional reliability these processes require.
Our servo drive solutions are engineered to address the unique demands of semiconductor manufacturing processes:
High-Precision Control. Featuring high-resolution A/D converters for optimal current control and micron-level positioning accuracy, our servo drives offer exceptional servo and PWM performance with high-bandwidth nested loops and biquad filters for notch or low pass applications. These features ensure the precise control essential for semiconductor manufacturing processes.
Compact Design. We offer space-efficient solutions for installations where real estate is at a premium. Our drives can be mounted on panels or PCBs, offering flexibility in integration with existing semiconductor equipment.
Advanced Safety Features. The built-in Safe Torque Off (STO) capability eliminates expensive contactors and complex wiring, facilitating system conformance to SIL 3 (IEC 61800-5-2) and Category 3 PL d (ISO 13849-1).
Field Oriented Control. Optimal orientation of the magnetic field ensures motors run faster and cooler, maximizing efficiency in continuous operation environments common in semiconductor fabs.
Robust Construction. EMI shielding and PE grounding protect against electromagnetic interference in sensitive environments. Ruggedized versions are available for applications requiring extreme reliability.
Network Integration. Our drives seamlessly integrate with existing systems via industry-leading protocols like EtherCAT and CANopen, ensuring the real-time control and monitoring crucial for today’s Industry 4.0 manufacturing environments.
High-Resolution Feedback. Supporting a wide array of protocols including BiSS, SSI, and EnDat, our drives ensure the sub-micron precision required for semiconductor processes. Dual-encoder feedback eliminates mechanical backlash by closing the loop directly on the load for maximum positional accuracy.
Our drives excel across multiple critical semiconductor manufacturing processes:
Ultra-compact servo drives for embedded applications with comprehensive connectivity
Compact, AC-powered, high-performance, efficient servo drives with comprehensive connectivity.
Dual-axis, high-performance servo drives with versatile communication and comprehensive connectivity
Compact, four-axis, high-performance servo drives with versatile motor support and comprehensive connectivity
Dual-axis, high-performance servo drives with advanced FPGA technology and flexible connectivity
Compact 3-axis servo drive modules with advanced FPGA technology and multi-network connectivity
Ultra-compact, high-performance servo drives with exceptional connectivity and flexibility
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